Capacitive Pressure Sensors

Protron has developed an absolute pressure sensor which is based on an ultra small surface micromachined capacitive sensor element. The choice of fused silica as a nonconducting substrate material results in the elimination of all parasitic capacitances to the substrate. The sensor has a long term high accuracy and a very small hysteresis compared to piezoresistive pressure sensors. Protron offers sensor dice and evaluation boards with application specific ASICS.

Specifications

  • pressure ranges: 0.3-1.3 bar / 2-8 bar
  • resolution: 0.02mbar @ 1bar
  • die size 0.6×1.2×0.5mm3
  • SMD package for sensor die 3x3mm²
  • QFN package for sensor and ASIC 5x5mm²
  • I²C digital output
  • low power consumption
  • very small hysteresis

Evaluation Samples

  • capacitive sensor die (0.6mm x 1.2mm x 0.5mm)
  • capacitive sensor die in a ceramic SMD package (3mm x 3mm)
  • calibrated capacitive sensor system (die and ASIC in 5x5mm SMD package)
  • capacitive sensor system evaluation board (calibrated system in 5x5mm SMD package soldered on PCB with pin headers)
  • USB micro-controller board with readout software for evaluation board

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