Advanced MEMS Technologies for Your Application

Modern microsystem technologies enable highly integrated and functionally dense products. With the steadily growing number of available processes and manufacturing options, selecting the most suitable technology for a specific application has become increasingly complex. Therefore, our development process begins with a focused technology consultation. We evaluate your concept with regard to manufacturability and provide the key information you need:

  • Is your design suitable for MEMS processing?
  • Which process technologies are required for implementation?
  • How does the concept fit into scalable production?
  • What cost structure can be expected?

We work closely with the Institute for Microsensors, -actuators and -systems (IMSAS) and microfab Service GmbH, operating 100mm and 150mm silicon wafer production lines in a shared cleanroom environment. This cooperation allows us to handle the full range of projects — from fundamental research to high-volume production. Our ISO 9001:2015 certified quality management ensures high reliability, transparent processes and consistent product performance.

FEM Modelling

Deep Reactive Ion Etching

Silicon Micromachining

Glass Etching

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