Welcome to Protron Mikrotechnik

Since 1999, Protron Mikrotechnik GmbH has been developing and manufacturing high-performance MEMS devices. Our engineering team combines long-standing process expertise with practical experience in RF-MEMS, microfluidics, micromechanical sensors and optical microsystems. We support the complete development chain — from requirements analysis and FEM simulation to prototype fabrication, characterization and scalable production on 100mm and 150mm wafer processing lines.

Complete MEMS Development – All in One Place

  • Concept & System Design
    • Requirements Definition
    • Multiphysics FEM Simulation
    • Layout & Mask Design
  • Prototyping & Process Development
    • Silicon Bulk Micromachining
    • Silicon Surface Micromachining
    • Die- & Wire Bonding
  • Test & Validation
    • Structure & Material Analysis 
    • Laserscanning & Electron Microscopy
    • Reliability Testing
  • Small-Series & Volume Production
    • 100mm & 150mm wafer production lines
    • Process Stability Monitoring
    • Quality Management ISO 9001:2015

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